ILLUMINATION DEVICE AND CLEAN ROOM EQUIPPED WITH ILLUMINATING DEVICE

PROBLEM TO BE SOLVED: To provide an illumination device and an illumination equipment, controlling emission of light related to g ray (wavelength 436 nm) and i ray (wavelength 365 nm) or the like, and to prevent a fault due to the illumination device or the illumination equipment when carrying out a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KAWAKAMI JUNZO, MORIMOTO TAIJI
Format: Patent
Sprache:eng
Schlagworte:
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