ILLUMINATION DEVICE AND CLEAN ROOM EQUIPPED WITH ILLUMINATING DEVICE

PROBLEM TO BE SOLVED: To provide an illumination device and an illumination equipment, controlling emission of light related to g ray (wavelength 436 nm) and i ray (wavelength 365 nm) or the like, and to prevent a fault due to the illumination device or the illumination equipment when carrying out a...

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Bibliographische Detailangaben
Hauptverfasser: KAWAKAMI JUNZO, MORIMOTO TAIJI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide an illumination device and an illumination equipment, controlling emission of light related to g ray (wavelength 436 nm) and i ray (wavelength 365 nm) or the like, and to prevent a fault due to the illumination device or the illumination equipment when carrying out a work using a photoresist and UV resin or the like which optically reacts with the g ray or the i ray. SOLUTION: The illumination device is provided with lamp parts 1, 1, 1, 1 having a white LED consisting of a red LED, a green LED, and a blue LED, and control parts 20, 20, 20, 20 to control lighting of the lamp parts 1, 1, 1, 1. When carrying out a patterning work using, for example, a photoresist and a UV resin or the like, illumination by only the red LED and green LED is carried out, and when making a maintenance work or an arrangement work or the like of the device, illumination by red LED, green LED, and blue LED is carried out. COPYRIGHT: (C)2009,JPO&INPIT