IMAGE DISPLAY DEVICE

PROBLEM TO BE SOLVED: To solve problems of image defects and deterioration of vacuum accompanying scrape of a surface of an interlayer insulating membrane arranged between a screen image signal wiring and a scanning signal wiring, and provide a long life image display device superior in display char...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KANEKO YOSHIYUKI, KUNIYASU TSUTOMU, YANASE HIROYASU, SHINTANI HIDEYUKI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To solve problems of image defects and deterioration of vacuum accompanying scrape of a surface of an interlayer insulating membrane arranged between a screen image signal wiring and a scanning signal wiring, and provide a long life image display device superior in display characteristics. SOLUTION: On the interlayer insulating membrane 14, a second insulating membrane 15 different in an etching rate from this interlayer insulating membrane 14 is laminated and arranged, and when forming an undercut part 16 in the second insulating membrane 15 by dry etching, the interlayer insulating membrane 14 is protected by the second insulating membrane 15. COPYRIGHT: (C)2009,JPO&INPIT