PROBE

PROBE

PROBLEM TO BE SOLVED: To provide a probe capable of coping with an excessive heating generation by giving a radiation function to the probe in order to prevent fusing of the probe caused by generation of a heavy current in the probe. SOLUTION: In this probe constituted of a support part to be mounte...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: MORI CHIKAOMI, MORI RYUICHIRO, TARUMI KENICHI
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a probe capable of coping with an excessive heating generation by giving a radiation function to the probe in order to prevent fusing of the probe caused by generation of a heavy current in the probe. SOLUTION: In this probe constituted of a support part to be mounted on a substrate of a probe card; an arm part extending from the support part; and a tip part provided on the tip of the arm part, to be brought into contact with an electrode which is an inspection object, the tip part comprises a contact part and a radiation fin. COPYRIGHT: (C)2009,JPO&INPIT