DETERGENT COMPOSITION

PROBLEM TO BE SOLVED: To provide a detergent composition having excellent pitting corrosion-preventing effects to a metal wiring material, especially a detergent composition having excellent properties for separating and removing a photoresist, and excellent corrosion-resisting properties and pittin...

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Bibliographische Detailangaben
Hauptverfasser:	TAKEI MIZUKI, NISHIJIMA YOSHITAKA, OI YOSUKE
Format:	Patent
Sprache:	eng
Schlagworte:	ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES BASIC ELECTRIC ELEMENTS CANDLES CHEMISTRY DETERGENT COMPOSITIONS DETERGENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FATTY ACIDS THEREFROM METALLURGY RECOVERY OF GLYCEROL RESIN SOAPS SEMICONDUCTOR DEVICES SOAP OR SOAP-MAKING USE OF SINGLE SUBSTANCES AS DETERGENTS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a detergent composition having excellent pitting corrosion-preventing effects to a metal wiring material, especially a detergent composition having excellent properties for separating and removing a photoresist, and excellent corrosion-resisting properties and pitting corrosion-preventing effects to the metal wiring material. SOLUTION: The detergent composition usable in a production process of a semiconductor integrated circuit or a liquid crystal display comprises (A) at least one kind of hydrofluoric acid and a hydrofluoric acid salt, (B) at least one kind of a sulfite and a disulfite, and (C) water. COPYRIGHT: (C)2009,JPO&INPIT