MANUFACTURING METHOD OF COMPOSITE CERAMIC MATERIAL POWDER

PROBLEM TO BE SOLVED: To manufacture a composite ceramic material powder for a laminated ceramic capacitors whose mother particles have composite daughter particles, by sticking the daughter particles on each mother particle uniformly in the state of dispersing them on the surface of each mother particle, without aggregating the daughter particles each other. SOLUTION: The manufacturing method of a composite ceramic material powder has a process for so dispersing into an organic solvent 2 the powder of mother particles 4 made of a metal oxide and the powder of daughter particles 3 made of a metal or the metal oxide thereof as to fill a processing container 6 with the resultant dispersion liquid and as to seal the processing container 6, a process for so supplying a pressed carbon dioxide into the processing container and so increasing slowly the inner pressure of the processing container and so heating it as to change the carbon dioxide to the region of a supercritical fluid and as to replace in parallel simultaneously the organic solvent 2 with the supercritical fluid and as to drain slowly the supercritical fluid, and a process for so drying thereby the inside of the processing container while reducing isothermally its pressure from a supercritical region to a predetermined pressure as to reducing its temperature in the state of maintaining its pressure at the predetermined pressure and as to manufacture the composite ceramic material powder. COPYRIGHT: (C)2009,JPO&INPIT