CIRCUIT AND METHOD FOR INSPECTING SEMICONDUCTOR

PROBLEM TO BE SOLVED: To provide a semiconductor inspection circuit capable of simultaneously inspecting a large number of terminals of inspection objects of a semiconductor device with a small number of measurement units of an LSI tester, in an inspection for AC characteristics of the semiconductor device. SOLUTION: The semiconductor inspection circuit 100 is provided with a signal line 101 to be connected to one terminal 203 of the semiconductor device 200, a switching circuit 102 for connecting the signal line 101 to a plurality of terminals 205 of the semiconductor device 200, and a resistor 103 to be connected to an end of the signal line 101, and is formed on the semiconductor device 200. Through the adoption of this configuration, and by turning on the switching circuit 102 and allowing a test signal generated by the LSI tester 300 to be input to the terminal 203, when an AC characteristic of an input signal is inspected, the test signal can be input to each terminal 205 via the signal line 101, and the terminals 205 of the plurality of inspection objects can be simultaneously inspected. COPYRIGHT: (C)2009,JPO&INPIT