SURFACE STATE INSPECTION DEVICE

PROBLEM TO BE SOLVED: To provide a surface state inspection device capable of inspecting the different regions to be inspected of a flat plate-shaped member to be inspected at the same time as a continuous inspection region. SOLUTION: The surface state inspection device for inspecting the surface inspection region, end inspection region SE and back inspection region S2 of a wafer 1 as a continuous region to be inspected is constituted of optical fibers 16, 17 and 18 and condensing lenses 19, 20 and 21 for irradiating the regions to be inspected with illumination light, object lenses 5, 6 and 7 for condensing the reflected or scattered lights from the regions to be inspected, line sensors 13, 14 and 15 for detecting the images by the reflected or scattered lights condensed by the object lenses 5, 6 and 7 and a signal synthesizing part 22 for arranging the directions of the images by the reflected or scattered lights from the regions to be inspected to obtain the image of a continuous inspection region. COPYRIGHT: (C)2009,JPO&INPIT