ELECTRON BEAM DRAWING DEVICE, METHOD FOR CALCULATING ASYNCHRONOUS ROTATION DEFLECTION, AND PATTERN DRAWING METHOD

PROBLEM TO BE SOLVED: To accurately calculate the amount of asynchronous rotation deflection. SOLUTION: The amount of rotation deflection in each rotation angle of a rotary table 31 is calculated as displacement data, and the displacement data are sequentially stored in a memory 52e. The displacement data sequentially stored in the memory 52e are rearranged on the basis of the value size, and a displacement data value at a median in the order of the rearranged displacement data is regarded as a reference value. By rearranging the displacement data on the basis of the value size, since a displacement data including the amount of asynchronous rotation deflection is in a higher rank or a lower rank in the rearranged displacement data, a reference value hardly affected by asynchronous rotation deflection can be calculated by determining the median displacement data value in the rearranged displacement data as the reference value. By using the reference value, the amount of asynchronous rotation deflection of the rotary table 31 can be calculated with high accuracy. COPYRIGHT: (C)2009,JPO&INPIT