FOREIGN MATTER REMOVAL METHOD AND CRYSTAL GROWTH METHOD
PROBLEM TO BE SOLVED: To provide a foreign matter removal method which easily and surely removes foreign matters floating on the surface of a melt liquid accumulated in a crucible. SOLUTION: This foreign matter removal method contains a melting process in which a silicon raw material is melt in a cr...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a foreign matter removal method which easily and surely removes foreign matters floating on the surface of a melt liquid accumulated in a crucible. SOLUTION: This foreign matter removal method contains a melting process in which a silicon raw material is melt in a crucible 5 and a silicon melt liquid 3 is accumulated, a solidified matter forming process in which a solidified foreign matter is formed by gathering foreign matters 6 floating on the surface of the silicon melt liquid 3 in the center of the silicon melt liquid 3 and solidifying a part of the surface of the silicon melt liquid 3 around the foreign matters 6, and a solidified matter recovery process in which the solidified foreign matter formed in the solidified matter forming process is recovered. COPYRIGHT: (C)2009,JPO&INPIT |
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