PIPE JOINT FOR ULTRAPURE WATER
PROBLEM TO BE SOLVED: To provide a pipe joint for ultrapure water and its piping system capable of preventing the elution of impurities from the pipe joint to ultrapure water, and capable of improving oxygen non-permeability and chemical resistance, in the pipe joint and its piping system capable of...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a pipe joint for ultrapure water and its piping system capable of preventing the elution of impurities from the pipe joint to ultrapure water, and capable of improving oxygen non-permeability and chemical resistance, in the pipe joint and its piping system capable of handling the ultrapure water. SOLUTION: In the pipe joint for ultrapure water, at least a liquid contact part of the synthetic resin pipe joint is coated with a DLC film. COPYRIGHT: (C)2009,JPO&INPIT |
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