SENSING UNIT AND METHOD OF MAKING THE SAME

PROBLEM TO BE SOLVED: To provide a sensing unit being high in degree of freedom in terms of measurement direction, and a method of making the same. SOLUTION: In a sensing unit 10, a movable portion 34 of a spring portion 30 is supported floatably above a recessed portion 22 formed in a substrate 20....

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Hauptverfasser:	SASAKI YOSHITAKA, HORINAKA TAKEHIRO, ISHIZAKI KAZUO, TANEMURA SHIGEKI, SHIMIZU TATSUJI
Format:	Patent
Sprache:	eng
Schlagworte:	GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a sensing unit being high in degree of freedom in terms of measurement direction, and a method of making the same. SOLUTION: In a sensing unit 10, a movable portion 34 of a spring portion 30 is supported floatably above a recessed portion 22 formed in a substrate 20. Thus, the movable portion 34 is capable of oscillating in any direction parallel to the substrate surface. Moreover, the movable portion 34 is capable of oscillating in the thickness direction of the substrate such that the amplitude of a center side end portion thereof reaches the maximum. A sensor portion 40 is provided on the movable portion 34. As a result, the sensing unit 10 being higher in degree of freedom in terms of the measurement direction than a conventional sensing unit that oscillates in only one direction. COPYRIGHT: (C)2009,JPO&INPIT