ELECTRONICS RACK, AND LITHOGRAPHIC APPARATUS COMPRISING SUCH ELECTRONICS RACK

PROBLEM TO BE SOLVED: To provide an improved cooling mechanism for an electronics rack and an electronics module, e.g., forming part of a lithographic apparatus. SOLUTION: The lithographic apparatus having an electronics module and the electronics rack in which the electronics module is operationall...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	VAN GILS PETRUS JACOBUS MARIA, VANDEBRIEL KRIS PIERRE AUGUSTA, EDWIN GERARDUS ADRIANUS JOHANNES RENDERS
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS PRINTED CIRCUITS SEMICONDUCTOR DEVICES
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