ELECTRONICS RACK, AND LITHOGRAPHIC APPARATUS COMPRISING SUCH ELECTRONICS RACK

ELECTRONICS RACK, AND LITHOGRAPHIC APPARATUS COMPRISING SUCH ELECTRONICS RACK

PROBLEM TO BE SOLVED: To provide an improved cooling mechanism for an electronics rack and an electronics module, e.g., forming part of a lithographic apparatus. SOLUTION: The lithographic apparatus having an electronics module and the electronics rack in which the electronics module is operationall...

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Bibliographische Detailangaben
Hauptverfasser: VAN GILS PETRUS JACOBUS MARIA, VANDEBRIEL KRIS PIERRE AUGUSTA, EDWIN GERARDUS ADRIANUS JOHANNES RENDERS
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
PRINTED CIRCUITS
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide an improved cooling mechanism for an electronics rack and an electronics module, e.g., forming part of a lithographic apparatus. SOLUTION: The lithographic apparatus having an electronics module and the electronics rack in which the electronics module is operationally housed is disclosed. The electronics rack includes an electrical connector to establish an electrical connection to a mating electrical connector of the electronics module and a cooling fluid connector to establish a cooling fluid connection to a mating cooling fluid connector of the electronics module, and a direction of insertion of the mating electrical connector substantially corresponds to a direction of insertion of the mating cooling fluid connector. COPYRIGHT: (C)2009,JPO&INPIT