MAGNETIC SENSING APPARATUS

PROBLEM TO BE SOLVED: To provide a magnetic sensing apparatus having a magnetic sensor installed in a movable section, and obtaining magnetic information in a micro mechanical structure manufactured by a micro machining technology. SOLUTION: The magnetic sensor 102 and an actuator 103 are provided o...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OTAKA KOICHI, FUSE AKIHIRO, KO HIROYOSHI, AZUMI JUNICHI
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS TESTING TRANSPORTING
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