MAGNETIC SENSING APPARATUS

MAGNETIC SENSING APPARATUS

PROBLEM TO BE SOLVED: To provide a magnetic sensing apparatus having a magnetic sensor installed in a movable section, and obtaining magnetic information in a micro mechanical structure manufactured by a micro machining technology. SOLUTION: The magnetic sensor 102 and an actuator 103 are provided o...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: OTAKA KOICHI, FUSE AKIHIRO, KO HIROYOSHI, AZUMI JUNICHI
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PHYSICS
TESTING
TRANSPORTING
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a magnetic sensing apparatus having a magnetic sensor installed in a movable section, and obtaining magnetic information in a micro mechanical structure manufactured by a micro machining technology. SOLUTION: The magnetic sensor 102 and an actuator 103 are provided on a surface of the movable section 101 coupled to a substrate 100. The magnetic sensor 102 is connected to wiring 104 and an electrode pad 105 so as to read a sensed signal. The movable section 101 is downwardly warped by an action of the actuator 103. The magnetic sensor 102 is provided at a tip of the movable section, and inclined to a reference plane of the substrate 100 at an angle. COPYRIGHT: (C)2009,JPO&INPIT