IMAGING APPARATUS FOR MICROSCOPE, AND PIXEL DEFECT DETECTING METHOD OF IMAGING APPARATUS

PROBLEM TO BE SOLVED: To detect a pixel defect (including pixel defects occurring subsequently) with high accuracy, without having to depend on the ambient temperature. SOLUTION: An imaging apparatus for a microscope has a camera 32, including a CCD 32a picking up a sample image; a microscope body 3...

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description PROBLEM TO BE SOLVED: To detect a pixel defect (including pixel defects occurring subsequently) with high accuracy, without having to depend on the ambient temperature. SOLUTION: An imaging apparatus for a microscope has a camera 32, including a CCD 32a picking up a sample image; a microscope body 31 including a member 43a cutting off light incident on the CCD 32a; a control function of storing a dark-time signal of the CCD 32a shielded by the member 43a from the light in a first storage means; a pixel defect detecting function of detecting the pixel defect, on the basis of the dark-time signal; a second storage means stored with position information on the pixel defect; a controller 33 which detects a light shield leakage on the basis of the dark-time signal; and a CRT monitor 35 which displays information associated with the light shield leak, when the controller 33 detects light shield leakage. COPYRIGHT: (C)2009,JPO&INPIT
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subjects ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
PICTORIAL COMMUNICATION, e.g. TELEVISION
TESTING
title IMAGING APPARATUS FOR MICROSCOPE, AND PIXEL DEFECT DETECTING METHOD OF IMAGING APPARATUS
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