LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide a lithographic apparatus in which liquid can be drained through a gap between, for example, an edge of an object and a substrate table on which the object is set. SOLUTION: The liquid immersion lithographic apparatus has a drain formed for draining the liquid through...

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Bibliographische Detailangaben

Hauptverfasser:	LEVASIER LEON MARTIN, WANTEN PETER FRANCISCUS, JACOBS JOHANNES HENRICUS WILHELMUS, ZAAL KOEN JACOBUS J M, VAN DER HOEVEN JAN CORNELIS, VAN DER MEULEN FRITS, DE JONG FREDERIK E, DE KLERK JOHANNES W, DE JONG MARTEIJN, ANSTOTZ DAVID LUCIEN, ANTONIUS LEENDERS MARTINUS HENDRIKUS, OTTENS JOOST JEROEN, BEEMS MARCEL HENDRIKUS MARIA, JOHANNES DROSTE RICHARD BERNARDUS, VAN DEN BRINK MARINUS AART, KADIJK EDWIN CORNELIS
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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