SILICON WAFER CARRIER

PROBLEM TO BE SOLVED: To provide a silicon wafer carrier capable of stable carriage without sticking impurities to a silicon wafer and without being in contact with other members. SOLUTION: The silicon wafer carrier, in air 3 for carrying the silicon wafer 2, comprises: a carrying table 4 provided w...

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Bibliographische Detailangaben

1. Verfasser:	MIYAZAKI MORIMASA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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