SILICON WAFER CARRIER

PROBLEM TO BE SOLVED: To provide a silicon wafer carrier capable of stable carriage without sticking impurities to a silicon wafer and without being in contact with other members. SOLUTION: The silicon wafer carrier, in air 3 for carrying the silicon wafer 2, comprises: a carrying table 4 provided with a plurality of holes 41 and at least one linear groove hole 42 provided in parallel with a carrying direction; a wafer floating means 5 for floating the wafer by jetting a gas from the holes 41 to the back surface of the wafer 2; a wafer carrying means 6 provided with at least one first nozzle 61 inside each linear groove hole 42, and for pressurizing the side edge part 4a of the wafer 2 in a floating state and carrying it by the first nozzle 61 moving in the linear groove hole 42 in the carrying direction while jetting the gas of a pressure higher than that of the gas jetted from the holes 41 of the wafer floating means 5 from a position more on the front side in the carrying direction than the part of the linear groove hole 42 where the wafer 2 before being carried is positioned; and a detection means positioned above the carrying table 4, and for detecting the position of the wafer 2. COPYRIGHT: (C)2009,JPO&INPIT