CRUCIBLE HANDLING DEVICE AND CRUCIBLE REPLACING METHOD
PROBLEM TO BE SOLVED: To provide a crucible handling device for mounting a crucible on a single crystal pulling apparatus after being moved in the vicinity of the apparatus or demounting the crucible, with which the time from after pulling of a single crystal up to the start of subsequent pulling of...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a crucible handling device for mounting a crucible on a single crystal pulling apparatus after being moved in the vicinity of the apparatus or demounting the crucible, with which the time from after pulling of a single crystal up to the start of subsequent pulling of a single crystal can be shortened and the production efficiency can be improved while suppressing cost increase; and to provide a crucible replacing method. SOLUTION: The crucible handling device 19 is used for mounting a crucible 3 on a single crystal pulling apparatus after being moved in the vicinity of the apparatus or demounting the crucible 3. The crucible handling device 19 is equipped with a base pedestal 21 which is freely attached to the pulling apparatus or detached from the apparatus, and grip members 22 which are provided freely turnably to the base pedestal 21 and so as to grip a crucible 3. In each grip member 22, a carbon fiber-reinforced carbon composite material 23 is provided on a part being brought into contact with the crucible 3. COPYRIGHT: (C)2009,JPO&INPIT |
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