METHOD FOR GROWING SEMICONDUCTOR LAYER, METHOD FOR PRODUCING SEMICONDUCTOR LIGHT-EMITTING ELEMENT, SEMICONDUCTOR LIGHT-EMITTING ELEMENT, AND ELECTRONIC DEVICE

PROBLEM TO BE SOLVED: To provide a method for growing a semiconductor layer which can select the plane direction of growth plane facet of a semiconductor layer to be grown on a substrate and can suppress a piezoelectric field of the semiconductor layer or can improve its crystal quality as needed. S...

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Bibliographische Detailangaben
Hauptverfasser: OMAE AKIRA, KAZETAGAWA MUNEYUKI, OTOMO JUGO, ARIMOCHI SUKEYUKI, HINO TOMOKIMI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a method for growing a semiconductor layer which can select the plane direction of growth plane facet of a semiconductor layer to be grown on a substrate and can suppress a piezoelectric field of the semiconductor layer or can improve its crystal quality as needed. SOLUTION: A semiconductor layer is grown which is constituted of a semiconductor having hexagonal crystal structure and has 11-22 or 10-13 plane direction on the 1-100 plane of a substrate constituted of a material having hexagonal crystal structure. Otherwise, a semiconductor layer which is constituted of the semiconductor having the hexagonal crystal structure and has 11-20 plane direction on the 1-102 plane of a substrate constituted of a material having the hexagonal crystal structure is grown while exposing at least one facet selected from a group of 11-22 plane facet, 0001 plane facet, 000-1 plane facet, 33-62 plane facet and 1-100 plane facet. COPYRIGHT: (C)2009,JPO&INPIT