ANGLE CHANGING DEVICE OF SUBSTRATE, AND PROCESSING DEVICE OF SUBSTRATE

PROBLEM TO BE SOLVED: To provide an angle changing device capable of tilting a substrate or restoring it from a tilted state to a horizontal state, at a relatively fast speed without giving impact to it. SOLUTION: A drive mechanism 61 rotates a conveyor unit 31, where a substrate is placed on its up...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: HIROSE HARUMICHI
Format: Patent
Sprache:eng
Schlagworte:
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