ANGLE CHANGING DEVICE OF SUBSTRATE, AND PROCESSING DEVICE OF SUBSTRATE

PROBLEM TO BE SOLVED: To provide an angle changing device capable of tilting a substrate or restoring it from a tilted state to a horizontal state, at a relatively fast speed without giving impact to it. SOLUTION: A drive mechanism 61 rotates a conveyor unit 31, where a substrate is placed on its upper surface, from a specified tilted angle to a horizontal state, or vice versa, with a spindle 56 as a support point via an arm 55. The drive mechanism comprises a first movable body 63, which moves along a first guide body 62, a second movable body 74 which moves along a second guide body 73; a first link 71 which turns with one end pivoted to the first movable body as a support point, driving the second movable body along the second guide body at the other end, when the first movable body is driven by a drive cylinder 65 along the first guide body; and a second link 77 which rotates the conveyor unit via the arm connected to the other end, moving along the second guide body, together with the second movable body when the second movable body is driven by the first link along the second guide body. COPYRIGHT: (C)2009,JPO&INPIT