THREE-DIMENSIONAL MEASURING DEVICE AND PORTABLE MEASURING DEVICE
PROBLEM TO BE SOLVED: To accurately measure a three-dimensional shape of a measuring object including a translucent portion without applying a reflection coating material. SOLUTION: When unpolarized incident light enters a sample surface at a fixed incident angle, surface reflected light therefrom b...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To accurately measure a three-dimensional shape of a measuring object including a translucent portion without applying a reflection coating material. SOLUTION: When unpolarized incident light enters a sample surface at a fixed incident angle, surface reflected light therefrom becomes S-polarized light, and internal scattered light becomes unpolarized light. In this case, a linearly polarizing plate capable of absorbing a P-polarized light component is arranged on an optical path where the surface reflected light and the internal scattered light are received by a light receiving part. Hereby, a state where the surface reflected light and an S-polarized light component in the internal scattered light are received can be formed. Namely, the S-polarized light originated in the surface reflected light can be received by the light receiving part with only the internal scattered light attenuated. COPYRIGHT: (C)2009,JPO&INPIT |
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