DEVICE FOR BRAKING ARTICLE TO BE CONVEYED IN FLOATING CONVEYOR

PROBLEM TO BE SOLVED: To provide a braking device capable of braking without allowing a braking means to come into contact with the front and rear surfaces of the article to be conveyed, i.e., without causing damage on the front and rear surfaces, and with less contact area between the article to be conveyed and the braking means when the plate-like article to be conveyed is conveyed while floating and stopped at a predetermined position. SOLUTION: This device conveys the article to be conveyed formed of a plate-like body such as a semi-conductor wafer or a liquid crystal glass. A fan filter unit for blowing clean air to a conveying passage is installed as a means for supporting the article in the conveying passage under the article. Braking rollers are so installed upright at both side edges of the conveying passage as to be opposed to the side end edges of the article, respectively. The braking rollers at the side edges of the conveying passage opposed to each other are so supported on a roller support body that their opposed interval can be changed. COPYRIGHT: (C)2009,JPO&INPIT