THIN FILM FORMING METHOD AND THIN FILM FORMING APPARATUS

PROBLEM TO BE SOLVED: To provide a thin film forming method capable of easily forming a thin film thinner than the conventional one without forming it on a substrate, and a thin film forming apparatus. SOLUTION: The thin film forming apparatus 10 is equipped with a cylindrical superconductive magnet...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	SUEDA MANABU, TANIMOTO TAKAFUMI, KATSUKI AKIO
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING PERFORMING OPERATIONS SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a thin film forming method capable of easily forming a thin film thinner than the conventional one without forming it on a substrate, and a thin film forming apparatus. SOLUTION: The thin film forming apparatus 10 is equipped with a cylindrical superconductive magnet 11 consisting of a superconductive coil, a cryostat 12 in which the superconductive magnet 11 is stored, a gradient magnetic field generator (not illustrated) for generating a gradient magnet field in a magnetic field generated by the superconductive magnet 11, and an annular member 13 formed by a wire member. COPYRIGHT: (C)2009,JPO&INPIT