METHOD OF MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE

PROBLEM TO BE SOLVED: To stabilize a process of manufacturing a semiconductor integrated circuit device by avoiding troubles in the operation of a dry pump that are caused when reaction products collect between the dry pump and a mechanical booster pump in a vacuum system of a CVD apparatus for use in the manufacture of a semiconductor device, or the like, and rapidly moves toward the dry pump. SOLUTION: An intermediate chamber for trapping reaction products on the lower inner surface of the chamber is provided between a dry pump and a mechanical booster pump, in the vacuum system of a CVD apparatus for use in the manufacture of a semiconductor device, or the like, and the upper end of an inlet pipe for the dry pump is inserted as far as a high position within the intermediate chamber. COPYRIGHT: (C)2009,JPO&INPIT