METHOD OF EVALUATING VAPOR DEPOSITION FILM, AND METHOD OF MANUFACTURING OPTICAL MEMBER USING THE SAME

PROBLEM TO BE SOLVED: To provide a method of evaluating highly reliably a surface property of a vapor deposition film such as sliding feeling. SOLUTION: The method of evaluating the vapor deposition film measures a phase change by scanning vibratingly a probe of an atomic force microscope on a vapor...

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Bibliographische Detailangaben
1. Verfasser:	TSURUMI MANABU
Format:	Patent
Sprache:	eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CONTACT LENSES DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MEASURING METALLURGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS SPECTACLES SUNGLASSES OR GOGGLES INSOFAR AS THEY HAVE THE SAME FEATURESAS SPECTACLES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method of evaluating highly reliably a surface property of a vapor deposition film such as sliding feeling. SOLUTION: The method of evaluating the vapor deposition film measures a phase change by scanning vibratingly a probe of an atomic force microscope on a vapor deposition film surface of an optical member having the vapor deposition film on a base material, and evaluates the vapor deposition film, based on the measured phase change. COPYRIGHT: (C)2009,JPO&INPIT