TRAP DEVICE, EXHAUST SYSTEM, AND TREATMENT SYSTEM USING THE SAME

PROBLEM TO BE SOLVED: To provide a treating system which uses a trap device and can surely regenerating an object W to be treated by surely removing exhausted matter collected by a trapping means. SOLUTION: The trap device, which is provided in a discharge passage 22 discharging exhaust gas from a t...

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Bibliographische Detailangaben
1. Verfasser:	YAMAZAKI RYOJI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES SEPARATION SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a treating system which uses a trap device and can surely regenerating an object W to be treated by surely removing exhausted matter collected by a trapping means. SOLUTION: The trap device, which is provided in a discharge passage 22 discharging exhaust gas from a treatment chamber 10 treating the object W to be treated and collects exhausted matter from the exhaust gas, is provided with: a housing 42 interposed in the discharge passage; the trapping means 48 set in the housing and collecting the exhausted matter; a trap heating means 54 heating the trapping means; a coolant introducing means 60 introducing a coolant into the housing; a coolant discharge part 62 discharging the coolant; and a control part 88 controlling the coolant to be introduced from the coolant introducing means with the trapping means heated by the trap heating means for removing the exhausted matter collected by the trapping means. COPYRIGHT: (C)2009,JPO&INPIT