COMBUSTIBLE GAS SENSOR

PROBLEM TO BE SOLVED: To provide a combustible gas sensor capable of realizing marked enhancement in measuring sensitivity and measuring precision, capable of improving an increase of the contact area of a measuring target gas with an oxidizing catalyst and the transmissivity of oxidation reaction heat, while achieving miniaturization as a whole. SOLUTION: A thermopile 4 constituted by bonding a different kind of metals is formed on the upper surface of an Si substrate 2 and a plurality of PT supported CNTs 6 are arranged on the hot contact point part 4a of the thermopile 4, in parallel in the vertical attitude crossing the plane of the hot contact point part 4a at right angles. The surface atom S of thiol 7 attached to one ends of respective CPt supported CNTs 6 and the gold atom Au of the gold plating 8 applied on an insulating film 5 are bonded to from a film, having a structure of CNT-R-S-Au. The Pt supported CNTs 6 is connected to the hot contact point part 4a of the thermopile 4. COPYRIGHT: (C)2009,JPO&INPIT