METHOD OF FRACTURING SEMICONDUCTOR SUBSTRATE, METHOD OF FRACTURING SOLAR CELL, AND THE SOLAR CELL
PROBLEM TO BE SOLVED: To provide a method of fracturing a semiconductor substrate, in which a uniform force is applied to all the fracturing grooves in fracturing the semiconductor substrate, and to provide a method of fracturing a solar cell and the solar cell. SOLUTION: In the method of fracturing...
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| creator | SHIMA MASAKI JINNO HIROYUKI |
| description | PROBLEM TO BE SOLVED: To provide a method of fracturing a semiconductor substrate, in which a uniform force is applied to all the fracturing grooves in fracturing the semiconductor substrate, and to provide a method of fracturing a solar cell and the solar cell. SOLUTION: In the method of fracturing a substrate, the dividing grooves 8 are formed so as not to become parallel to the cleavage planes of the semiconductor substrate 1, and the semiconductor substrate 1 is bent along the dividing grooves 8, thereby fracturing the semiconductor substrate 1 along the dividing grooves 8. COPYRIGHT: (C)2009,JPO&INPIT |
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SOLUTION: In the method of fracturing a substrate, the dividing grooves 8 are formed so as not to become parallel to the cleavage planes of the semiconductor substrate 1, and the semiconductor substrate 1 is bent along the dividing grooves 8, thereby fracturing the semiconductor substrate 1 along the dividing grooves 8. 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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | METHOD OF FRACTURING SEMICONDUCTOR SUBSTRATE, METHOD OF FRACTURING SOLAR CELL, AND THE SOLAR CELL |
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