INFRARED SENSOR DEVICE

PROBLEM TO BE SOLVED: To provide an infrared sensor device of thermopile type prevented from generating heat distribution (unevenness in temperature) due to heat generation in the amplifier, and the like, inside an integrated chip. SOLUTION: The semiconductor chip 10 comprises the area sensor 12 of thermopile type consisting of a plurality of thermopile elements arranged into an array; an amplifier 13 for amplifying output of area sensor 12; and a heat conductive metal membrane 11, arranged at least adjacent to a part of periphery of the area. Even the thermal distribution (uneven temperature) due to heat generation in the amplifier in the semiconductor chip, the heat is diffused by the heat conductive metal membrane, so that the temperature in the semiconductor chip becomes uniform in temperature distribution. Thus, the infrared sensor device formed together with the thermopile array part (thermopile type area sensor) and its amplifier for amplifying the output of the same can measure the temperature with high accuracy. COPYRIGHT: (C)2009,JPO&INPIT