FORMING DEVICE OF TRANSPARENT CONDUCTIVE FILM ONTO FLEXIBLE SUBSTRATE, MASK MEMBER, AND TRANSPARENT CONDUCTIVE FILM RESIN SUBSTRATE FOR ORGANIC ELECTROLUMINESCENT ELEMENT

PROBLEM TO BE SOLVED: To provide a transparent conductive film forming device having a high quality, high productivity, and capable of cost reduction by continuously performing a pattern forming of a transparent conductive film on a flexible resin substrate as a forming method of a mask patterning o...

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Bibliographische Detailangaben
1. Verfasser:	TAKASHIMA NOBUHIKO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CABLES CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CONDUCTORS DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INSULATORS METALLURGY NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING ORDIELECTRIC PROPERTIES SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a transparent conductive film forming device having a high quality, high productivity, and capable of cost reduction by continuously performing a pattern forming of a transparent conductive film on a flexible resin substrate as a forming method of a mask patterning of the transparent conductive pattern is provided in the long flexible resin substrate, and provide a mask member used for the same, and a transparent conductive film resin substrate for an organic EL manufactured by this forming device. SOLUTION: This is the forming device of a transparent conductive film to form the transparent conductive film on a long flexible resin substrate which is continuously transferred in a vacuum tank 1. While moving a mask member for pattern forming closely in contact and synchronized with the flexible resin substrate during transfer of the flexible resin substrate 2, pattern forming is carried out by using a thin-film forming means in the closely contacted zone with the mask member M. COPYRIGHT: (C)2008,JPO&INPIT