EXPOSURE DEVICE

PROBLEM TO BE SOLVED: To provide an exposure device in which assembling and adjustment work of a position detection device for a main bed and a sub-bed coupled to each other can be facilitated, and whose cost can be reduced by simplifying a manufacturing process. SOLUTION: The exposure device is equipped with the position detection device 50 which detects the position of a substrate stage 15 with respect to a bed 13. The position detection device 50 has a plurality of linear scales 51 and 52 which have positional information with respect to the bed 13 and are disposed by the main bed 11 and the sub-bed 12 along the moving direction of the substrate stage, and first and second sensor heads 53 and 54 which are fixed to the substrate stage 15 apart in the moving direction of the substrate stage 15 and can detect the positional information of the linear scales 51 and 52, and at least either of the first and second sensor heads 53 and 54 always detects the position of the substrate stage 15 with respect to the bed 13. COPYRIGHT: (C)2008,JPO&INPIT