METHOD OF MANUFACTURING MICROCHIP, AND MICROCHIP

PROBLEM TO BE SOLVED: To provide a method of manufacturing a microchip capable of facilitating the positioning microchip substrates to more strongly joint the microchip substrates to each other. SOLUTION: A groove 2 for a flow channel is formed to the surface of the microchip substrate 1 and a pin 3...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: SEKIHARA MIKIJI, KAMIHIRA MASAYOSHI
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!