POLISHING DEVICE AND METHOD OF MANUFACTURING SAME

PROBLEM TO BE SOLVED: To provide a polishing device having a binder for fixing abrasive grains which is also removed by a polishing fluid according to the wear of the abrasive grains and simply manufacturable at low cost, and also to provide a method of manufacturing the polishing device. SOLUTION:...

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1. Verfasser: CHO SUSUMU
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a polishing device having a binder for fixing abrasive grains which is also removed by a polishing fluid according to the wear of the abrasive grains and simply manufacturable at low cost, and also to provide a method of manufacturing the polishing device. SOLUTION: This polishing device for fixing abrasive grains is formed of the abrasive grains and the binder for fixing the abrasive grains. During the polishing, the surface layer portion of the binder is dissolved or peeled by the polishing fluid, and the abrasive grains are made to project from the surface layer. The binder is formed of a binder polymer, a photopolymerizable polyfunctional monomer, and a photopolymerization initiator. The binder fixes the abrasive grains since it is formed of the binder polymer, the photopolymerizable polyfunctional monomer, and the photopolymerization initiator, and the photopolymerizable polyfunctional monomer is radically photopolymerized with an optical initiator by the exposure of ultraviolet, twined with the binder polymer, and bridged and hardened. Also, since an alkali polishing fluid is added to the polishing fluid during the processing, the binder is ruptured and peeled, and the abrasive grains are made to project. COPYRIGHT: (C)2008,JPO&INPIT