APPARATUS AND METHOD FOR MEASURING ELECTRIC FIELD AND TEMPERATURE

PROBLEM TO BE SOLVED: To measure electric fields and the temperature of electronic devices by one measuring apparatus and speedily provide electrical/thermal design data of LSI chips/packages at low costs. SOLUTION: An electric field and temperature measuring apparatus is constituted of a laser beam source 100; a fiber amplifier 102; a polarization controller 103; an EO sensor 105; an optical analyzer 115; an optical circulator 104; a photo-detector 117 for electric field detection; an optical spectrum analyzer 119 for temperature detection; a coupler 116 for branching emergent light of the optical analyzer 115; an optical fiber 101 for coupling each element; and an RF spectrum analyzer 118 and uses electro-optical effects of the EO sensor 105 for electric field measurement or optical resonance characteristics for temperature measurement. COPYRIGHT: (C)2008,JPO&INPIT