CHARGED PARTICLE BEAM DEVICE AND APPLIED VOLTAGE CONTROL METHOD

PROBLEM TO BE SOLVED: To provide a charged particle device and an applied voltage control method which can suppress deterioration of detection efficiency of signal electrons in the case the orbit drawn by the signal electrons changes. SOLUTION: The charged particle beam device is provided with a test piece table 21 capable of mounting a test piece 22, an optical system 13 which converges the charged particle beams generated by a charged particle beam source on a test piece on the test piece table by a focusing magnetic field, a signal electron detector 1 which detects the signal electrons 5 generated from the test piece 22, auxiliary electrodes 2-4 which are installed on the signal electron detector 1, an electrode power source 46 which applies voltage to the respective auxiliary electrodes 2-4, and a control device 40 which controls the applied voltage to the auxiliary electrodes 2-4 by the electrode power source 46 according to the inclination angle of the test piece table 21 and the intensity of the focusing magnetic field of an objective lens 11, based on correlations of the applied voltage to the auxiliary electrodes 2-4, the inclination angles of the test piece table 21, and the intensity of the focusing magnetic field of the objective lens 11 established beforehand. COPYRIGHT: (C)2008,JPO&INPIT