PARTIAL PRESSURE DETECTION METHOD OF SPECIFIC GAS AND QUADRUPOLE MASS ANALYZER

PROBLEM TO BE SOLVED: To provide a partial pressure detection method of a specific gas capable of correcting the partial pressure measured under a high-pressure atmosphere to a good value without using a total pressure measuring means. SOLUTION: The partial pressure of the specific gas in a gas to b...

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Hauptverfasser:	NAKAJIMA TOYOAKI, KUROKAWA YUJIRO, YURI TSUTOMU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE METALLURGY PHYSICS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a partial pressure detection method of a specific gas capable of correcting the partial pressure measured under a high-pressure atmosphere to a good value without using a total pressure measuring means. SOLUTION: The partial pressure of the specific gas in a gas to be measured is detected by measuring the ion current value corresponding to the mass charge ratio of the specific gas using a quadrupole mass analyzer 10. The measured value of a first ion current value corresponding to the mass charge ratio of the specific gas is corrected using the measured value of a second ion current value corresponding to the mass change ratio wherein the peak of an ion current value does not appears to calculate the actual partial pressure of the specific gas. COPYRIGHT: (C)2008,JPO&INPIT