PRODUCTION METHOD OF HIGH CONCENTRATION OZONE GAS, AND ITS APPARATUS

PROBLEM TO BE SOLVED: To provide a method capable of removing nitrogen or argon or both gas in an oxygen PSA unit. SOLUTION: The production method of high concentration ozone gas comprises producing ozone from oxygen from an oxygen generator 1 and condensing the ozone for supply. Either nitrogen or...

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Bibliographische Detailangaben

Hauptverfasser:	IZUMI JUN, OKA NOBUKI, YASUTAKE AKINORI, TSUTAYA HIROYUKI, TOMONAGA NARIYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS
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