PRODUCTION METHOD OF HIGH CONCENTRATION OZONE GAS, AND ITS APPARATUS

PRODUCTION METHOD OF HIGH CONCENTRATION OZONE GAS, AND ITS APPARATUS

PROBLEM TO BE SOLVED: To provide a method capable of removing nitrogen or argon or both gas in an oxygen PSA unit. SOLUTION: The production method of high concentration ozone gas comprises producing ozone from oxygen from an oxygen generator 1 and condensing the ozone for supply. Either nitrogen or...

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Bibliographische Detailangaben
Hauptverfasser: IZUMI JUN, OKA NOBUKI, YASUTAKE AKINORI, TSUTAYA HIROYUKI, TOMONAGA NARIYUKI
Format: Patent
Sprache:eng
Schlagworte:
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a method capable of removing nitrogen or argon or both gas in an oxygen PSA unit. SOLUTION: The production method of high concentration ozone gas comprises producing ozone from oxygen from an oxygen generator 1 and condensing the ozone for supply. Either nitrogen or argon is removed in the oxygen generator, and the other is removed in an exhaust gas path 24 of an ozone concentrator 3. The concentration of oxygen is detected in the exhaust gas path of the ozone concentrator, and either to the inlet side of the oxygen generator or the inlet side of the ozone generator is selected as the exhaust gas path, according to the degree of the concentration. COPYRIGHT: (C)2008,JPO&INPIT