CLEANING APPARATUS
PROBLEM TO BE SOLVED: To provide a cleaning apparatus easily cleaning and carrying a large mask substrate with a compact cleaning tub, not requiring a large work space, with preferable operability. SOLUTION: A portal substrate operation part of the cleaning apparatus has a substrate elevating part f...
Gespeichert in:
| Hauptverfasser: | , , , , |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | FUJIOKA YUTAKA HARASAKI TADAHARU TAKISHITA KAZUHIRO INOUE KAZUYASU TOZAWA HIRONORI |
| description | PROBLEM TO BE SOLVED: To provide a cleaning apparatus easily cleaning and carrying a large mask substrate with a compact cleaning tub, not requiring a large work space, with preferable operability. SOLUTION: A portal substrate operation part of the cleaning apparatus has a substrate elevating part forming a portal form straddling the cleaning tub 60, lowering a large glass substrate 85 in the cleaning tub 60, and elevating the lowered large glass substrate 85 from the cleaning tub 60; and a substrate carrying part moving in relation to the cleaning tub 60, and moves on two guide rails 40-1, 2 set on both sides of the cleaning tub 60. COPYRIGHT: (C)2008,JPO&INPIT |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_JP2008207116A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>JP2008207116A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_JP2008207116A3</originalsourceid><addsrcrecordid>eNrjZBBy9nF19PP0c1dwDAhwDHIMCQ3mYWBNS8wpTuWF0twMSm6uIc4euqkF-fGpxQWJyal5qSXxXgFGBgYWRgbmhoZmjsZEKQIAdnoedQ</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>CLEANING APPARATUS</title><source>esp@cenet</source><creator>FUJIOKA YUTAKA ; HARASAKI TADAHARU ; TAKISHITA KAZUHIRO ; INOUE KAZUYASU ; TOZAWA HIRONORI</creator><creatorcontrib>FUJIOKA YUTAKA ; HARASAKI TADAHARU ; TAKISHITA KAZUHIRO ; INOUE KAZUYASU ; TOZAWA HIRONORI</creatorcontrib><description>PROBLEM TO BE SOLVED: To provide a cleaning apparatus easily cleaning and carrying a large mask substrate with a compact cleaning tub, not requiring a large work space, with preferable operability. SOLUTION: A portal substrate operation part of the cleaning apparatus has a substrate elevating part forming a portal form straddling the cleaning tub 60, lowering a large glass substrate 85 in the cleaning tub 60, and elevating the lowered large glass substrate 85 from the cleaning tub 60; and a substrate carrying part moving in relation to the cleaning tub 60, and moves on two guide rails 40-1, 2 set on both sides of the cleaning tub 60. COPYRIGHT: (C)2008,JPO&INPIT</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; CLEANING ; CLEANING IN GENERAL ; CONVEYING ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; HANDLING THIN OR FILAMENTARY MATERIAL ; PACKING ; PERFORMING OPERATIONS ; PNEUMATIC TUBE CONVEYORS ; PREVENTION OF FOULING IN GENERAL ; SEMICONDUCTOR DEVICES ; SHOP CONVEYOR SYSTEMS ; STORING ; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING ; TRANSPORTING</subject><creationdate>2008</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20080911&DB=EPODOC&CC=JP&NR=2008207116A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76294</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20080911&DB=EPODOC&CC=JP&NR=2008207116A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>FUJIOKA YUTAKA</creatorcontrib><creatorcontrib>HARASAKI TADAHARU</creatorcontrib><creatorcontrib>TAKISHITA KAZUHIRO</creatorcontrib><creatorcontrib>INOUE KAZUYASU</creatorcontrib><creatorcontrib>TOZAWA HIRONORI</creatorcontrib><title>CLEANING APPARATUS</title><description>PROBLEM TO BE SOLVED: To provide a cleaning apparatus easily cleaning and carrying a large mask substrate with a compact cleaning tub, not requiring a large work space, with preferable operability. SOLUTION: A portal substrate operation part of the cleaning apparatus has a substrate elevating part forming a portal form straddling the cleaning tub 60, lowering a large glass substrate 85 in the cleaning tub 60, and elevating the lowered large glass substrate 85 from the cleaning tub 60; and a substrate carrying part moving in relation to the cleaning tub 60, and moves on two guide rails 40-1, 2 set on both sides of the cleaning tub 60. COPYRIGHT: (C)2008,JPO&INPIT</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CLEANING</subject><subject>CLEANING IN GENERAL</subject><subject>CONVEYING</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>HANDLING THIN OR FILAMENTARY MATERIAL</subject><subject>PACKING</subject><subject>PERFORMING OPERATIONS</subject><subject>PNEUMATIC TUBE CONVEYORS</subject><subject>PREVENTION OF FOULING IN GENERAL</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>SHOP CONVEYOR SYSTEMS</subject><subject>STORING</subject><subject>TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2008</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZBBy9nF19PP0c1dwDAhwDHIMCQ3mYWBNS8wpTuWF0twMSm6uIc4euqkF-fGpxQWJyal5qSXxXgFGBgYWRgbmhoZmjsZEKQIAdnoedQ</recordid><startdate>20080911</startdate><enddate>20080911</enddate><creator>FUJIOKA YUTAKA</creator><creator>HARASAKI TADAHARU</creator><creator>TAKISHITA KAZUHIRO</creator><creator>INOUE KAZUYASU</creator><creator>TOZAWA HIRONORI</creator><scope>EVB</scope></search><sort><creationdate>20080911</creationdate><title>CLEANING APPARATUS</title><author>FUJIOKA YUTAKA ; HARASAKI TADAHARU ; TAKISHITA KAZUHIRO ; INOUE KAZUYASU ; TOZAWA HIRONORI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2008207116A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2008</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CLEANING</topic><topic>CLEANING IN GENERAL</topic><topic>CONVEYING</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>HANDLING THIN OR FILAMENTARY MATERIAL</topic><topic>PACKING</topic><topic>PERFORMING OPERATIONS</topic><topic>PNEUMATIC TUBE CONVEYORS</topic><topic>PREVENTION OF FOULING IN GENERAL</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>SHOP CONVEYOR SYSTEMS</topic><topic>STORING</topic><topic>TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>FUJIOKA YUTAKA</creatorcontrib><creatorcontrib>HARASAKI TADAHARU</creatorcontrib><creatorcontrib>TAKISHITA KAZUHIRO</creatorcontrib><creatorcontrib>INOUE KAZUYASU</creatorcontrib><creatorcontrib>TOZAWA HIRONORI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>FUJIOKA YUTAKA</au><au>HARASAKI TADAHARU</au><au>TAKISHITA KAZUHIRO</au><au>INOUE KAZUYASU</au><au>TOZAWA HIRONORI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>CLEANING APPARATUS</title><date>2008-09-11</date><risdate>2008</risdate><abstract>PROBLEM TO BE SOLVED: To provide a cleaning apparatus easily cleaning and carrying a large mask substrate with a compact cleaning tub, not requiring a large work space, with preferable operability. SOLUTION: A portal substrate operation part of the cleaning apparatus has a substrate elevating part forming a portal form straddling the cleaning tub 60, lowering a large glass substrate 85 in the cleaning tub 60, and elevating the lowered large glass substrate 85 from the cleaning tub 60; and a substrate carrying part moving in relation to the cleaning tub 60, and moves on two guide rails 40-1, 2 set on both sides of the cleaning tub 60. COPYRIGHT: (C)2008,JPO&INPIT</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | eng |
| recordid | cdi_epo_espacenet_JP2008207116A |
| source | esp@cenet |
| subjects | BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL CONVEYING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING |
| title | CLEANING APPARATUS |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-22T15%3A50%3A17IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=FUJIOKA%20YUTAKA&rft.date=2008-09-11&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EJP2008207116A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |