LIQUID JETTING HEAD AND LIQUID JETTING APPARATUS

PROBLEM TO BE SOLVED: To provide a liquid jetting head which can prevent a diaphragm from being cracked even if a piezoelectric body layer is burnt, and a liquid jetting apparatus using the liquid jetting head. SOLUTION: This liquid jetting head comprises a flow channel forming substrate 10 in which...

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Bibliographische Detailangaben
Hauptverfasser: KISHIDA SANSEI, TAKAHASHI TOMOAKI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a liquid jetting head which can prevent a diaphragm from being cracked even if a piezoelectric body layer is burnt, and a liquid jetting apparatus using the liquid jetting head. SOLUTION: This liquid jetting head comprises a flow channel forming substrate 10 in which a pressure generating chamber 12 communicating with a nozzle opening 21 for emitting a jet of liquid droplets is formed, the diaphragm 50 which is provided on the one surface side of the flow channel forming substrate 10, and a piezoelectric element 300 which is provided on the diaphragm 50. The diaphragm 50 comprises a plurality of insulating layers 51 and 52, and ductile layers 55 which are provided among a plurality of the insulating layers 51 and 52, respectively. COPYRIGHT: (C)2008,JPO&INPIT