CONTROLLER OF LINEAR MOTOR

PROBLEM TO BE SOLVED: To provide a method and an apparatus capable of performing a highly gained driving at high speed and high accuracy by obtaining vibration suppressing control means capable of continuously keeping pace against variation in thrust of a linear motor, as the driving of the linear motor is generally accompanied by a rotational vibration (yawing, pitching, rolling), resulting in difficulty to keep a speed and a positional accuracy stable. SOLUTION: The controlling method of the linear motor has an estimating means (an observer 107) for estimating information 10 on the location and speed at the gravity point 13 of a linear-motor movable portion 106, by the information 10 of a location or a speed sensor 8 and the signal (instructed value of thrust-force 11) outputted from a speed controller 102. The estimated information 16, 17 on the location and speed obtained from the observer 107 is fed back to controllers 102, 104, to perform control on the location and speed. COPYRIGHT: (C)2008,JPO&INPIT