ABNORMALITY DETECTION DEVICE, ABNORMALITY DETECTION METHOD AND PROCESSOR WITH ITS ABNORMALITY DETECTION DEVICE

PROBLEM TO BE SOLVED: To provide an abnormality detection device capable of detecting various kinds of abnormality generated in a processor processing a processed body with high accuracy. SOLUTION: This abnormality detection device is an abnormality detection device detecting the abnormality generated in the processor 100 processing the processed body 103. The processor 100 includes at least one control part 108 keeping the processed body 103 in a certain state by use of a control signal 110 for processing the processed body 103. The abnormality detection device has a frequency distribution measurement part 111 measuring a frequency distribution 112 of the control signal 110 used by the control part 108. The abnormality detection device has an abnormality decision part 109 deciding that the abnormality occurs in the processor 100 when the frequency distribution 112 measured by the frequency distribution measurement part 111 changes and is deviated from a prescribed decision criterion. COPYRIGHT: (C)2008,JPO&INPIT