METHOD OF MEASURING CROSS SECTIONAL SHAPE OF WORKPIECE

PROBLEM TO BE SOLVED: To provide a method of measuring a cross sectional shape of a workpiece for improving measurement precision of the cross sectional shape of the workpiece of a complicated shape at first and accelerating measurement of the cross sectional shape of the whole workpiece of the complicated shape at second. SOLUTION: The method of measuring the cross sectional shape of the workpiece irradiates a plurality of slit lights onto the same line of the workpiece W from positions mutually differentiating inclination angles to the workpiece, and measures the cross sectional shape of the workpiece W by properly calculating each brightness value of each reflection light from the workpiece W. Therefore the method can accurately measure the cross sectional shape of the workpiece by the other slit lights even when one slit light generates halation, and in addition, can improve the measurement precision as compared with the conventional method having measured the cross sectional shape by one slit light by properly calculating each brightness value of each reflection light from the plurality of the slit lights. COPYRIGHT: (C)2008,JPO&INPIT