METHOD AND APPARATUS FOR VISUALLY INSPECTING METAL FOIL PLATED LAMINATED PLATE

PROBLEM TO BE SOLVED: To provide a technique for visually inspecting metal foil plated laminated plates and capable of accurately inspecting defects in a short time and improving the yield of circuit formation. SOLUTION: For determining the presence or absence of defects such as indentations, flaws, pinholes, and corrugations in the surface of the metal foil plated laminated plate 1, an visual inspection apparatus A is provided with both a camera 2 for photographing the surface of a metal foil plated laminated plate 1 and a reference part 20 having a monitor 9 for determining the presence or absence of defects on the basis of images acquired by photographing by the camera 2. Images of marking parts marked at visually recognized defective parts of the metal foil plated laminated plate 1 are photographed by the camera 2 and inputted to the reference part 20, and images of an external layer circuit pattern scheduled to be formed in the surface of the metal foil plated laminated plate 1 to be inspected are also inputted to synthetically display both images on the monitor 9 and determine the presence or absence of defects on the basis of interference of the marking parts to the external layer circuit pattern. COPYRIGHT: (C)2008,JPO&INPIT