LINEAR SCALE PROBE USED FOR SUBSTRATE INSPECTION SYSTEM

PROBLEM TO BE SOLVED: To solve the problem that conventional probes have required space for the arrangement of wirings and can have caused the fracture of coatings and the breakage of wires, when inspection panels are produced or due to bending and extending, when repaired since the conventional probes are wirings in a free state lead out of a casing. SOLUTION: A linear scale probe is constituted of: a movable shaft having a magnetic substance movable in the casing; a primary coil opposed to the magnetic substance for generating electric fields; a secondary coil for capturing induced current by the movement of the magnetic substance; a contact part, provided with first and second electrodes for lead terminals to be electric connected to the primary coil and the secondary coil; and a housing part, provided with lead terminals to be fitted in and removed from a housing part of an external apparatus, capable of connecting to contact pins, and electrically connected to the first and second electrodes for lead terminals. The movable shafts are brought into contact with a plurality of electronic components mounted on a substrate to detect its state of mounting in the linear scale probe to be used for inspection panels of a substrate inspection system. COPYRIGHT: (C)2008,JPO&INPIT