TEMPERATURE TESTER AND TEMPERATURE TEST METHOD

PROBLEM TO BE SOLVED: To provide a temperature tester and a temperature test method for individually performing detailed heating tests and cooling tests on specimens while automatically performing temperature tests on the plurality of specimens without changing the size of the tester in its entirety. SOLUTION: A plurality of thermal insulation boards 5 having heat insulating properties are provided on an upper surface of a table 1 so as to severally close table opening parts 1a. With a space kept from the upper surface of the table 1, an upper frame is provided with a thermal insulation box 11 having heat insulating properties so as to face a part of the rotation path of the insulation boards 5. A lower surface of the insulation box 11 is left open. The insulation box 11 is joinable to/separable from an insulation board 5. The insulation box 11 and the insulation boards 5 are joined to each other, thereby forming a thermal insulation container 200 that separates a substrate 100 from the outside air while housing the substrate 100 therein. COPYRIGHT: (C)2008,JPO&INPIT